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項(xiàng)目

指標(biāo)

純氮

高純氮

超純氮

純度（體積分?jǐn)?shù)）/10^-2

≥

99.99

99.999

99.9999

氧含量（體積分?jǐn)?shù)）/10^-6

≤

50

3

0.1

氬含量（體積分?jǐn)?shù)）/10^-6

≤

—

—

2

氫含量（體積分?jǐn)?shù)）/10^-6

≤

15

1

0.1

CO含量（體積分?jǐn)?shù)）/10^-6

≤

5

1

0.1

CO2含量（體積分?jǐn)?shù)）/10^-6

≤

10

1

0.1

CH4含量（體積分?jǐn)?shù)）/10^-6

≤

5

1

0.1

水含量（體積分?jǐn)?shù)）/10^-6

≤

15

3

0.5