DCS多層分級(jí)控制系統(tǒng)
DCS的基本設(shè)計(jì)思想是采用控制分散、操作和管理集中的思路，實(shí)現(xiàn)多層分級(jí)控制和合作的結(jié)構(gòu)。目前，主要應(yīng)用在冶金、電力和石化等領(lǐng)域。
DCS 是實(shí)現(xiàn)多層分級(jí)控制的系統(tǒng)，在使用的過(guò)程中具有兩個(gè)基本的分級(jí)環(huán)節(jié)：現(xiàn)場(chǎng)控制單元和操作站。
DCS基本分級(jí)環(huán)節(jié)
● 現(xiàn)場(chǎng)控制單元：
指遠(yuǎn)離控制中心而在現(xiàn)場(chǎng)附近使用的控制系統(tǒng)，可根據(jù)DCS本身機(jī)構(gòu)實(shí)現(xiàn)對(duì)現(xiàn)場(chǎng)的監(jiān)控和控制，F(xiàn)場(chǎng)控制單元的使用需要準(zhǔn)備不同的設(shè)備，如配置插件，即根據(jù)系統(tǒng)的要求配置相應(yīng)的中央處理器插件、電源插件和通信插件等，為后期的分級(jí)控制奠定基礎(chǔ)；
冗余配置是分級(jí)控制系統(tǒng)中重要的環(huán)節(jié)之一，在配置的過(guò)程中要對(duì)主機(jī)插件、電源插件和通信插件等實(shí)現(xiàn)冗余配置；實(shí)現(xiàn)隨現(xiàn)場(chǎng)的分級(jí)控制和監(jiān)測(cè)需要對(duì)不同的硬件添加DCS，確保分級(jí)控制的可靠性。
● 操作站：
操作站中記錄并顯示控制系統(tǒng)中的不同數(shù)據(jù)，是展示人機(jī)交互的場(chǎng)所，常用的操作站中包括系主機(jī)控制、顯示設(shè)備和鍵盤(pán)輸入設(shè)備等，是主要使用人工操作記錄和反饋的場(chǎng)所，主要實(shí)現(xiàn)顯示不同數(shù)據(jù)、報(bào)警和操作等多種重要功能。
Applied Materials Process Kit S3V UNI92
Applied Materials Process Kit TR Open
Applied Materials Sputter Process Kit
AE RFDS 2000-2VGENERATO?R 3155038 2000W, 13.56MHz
AMAT CVD MATCH 3000V, 13.56MHz 0010-09750W
AMAT ETCH MATCH 3000V, 13.56MHz 0010-09490W
AMAT LF5 GENERATOR 752 057 2050 500W, 50-460KHz
ASTEX ATL-100RA MATCH ATL100RA 500W, 350KHz
ENI / MKS OEM12B GENERATOR OEM12B-07 0190-76048
LAM RESEARCH MINI MATCH 13.56MHz 853-015130-503-?C-262C
TRAZAR TRAZAR MATCH AMU2-1 4400V, 13.56MHz
VARIAN E500 MAIN POWER SOURCE CABINET E11033350
VARIAN E500 SCAN GEN CONTROL E11005430
VARIAN E500 PNEU ASSY,CHASSIS SOURCE CAB E11033360
VARIAN E500 TERMINAL PNUMATICS MODULE E11064970
VARIAN E500 PS Control PCB D-E15002350
VARIAN E500 TCR POWER SUPPLY E11000140
AMAT P5000 CHAMBER INTERCONNECT BOARD ASSY 0100-09099
AMAT P5000 WAFER LIFT PRECISION 5000 0010-09341
AMAT P5000 WAFER LIFT CERAMIC HOOP 0010-10033
AMAT P5000 TURBOTRONIK NT340M/I
AMAT P5000 TURBO PUMP TURBOVAC 340MC
AMAT P5000 TEOS INTERLOCK BOARD 0100-09175 REV.C
AMAT P5000 TEOS INTERFACE BOARD 0100-09174
AMAT P5000 TEOS GAS INTERFACE BOARD 0100-09107
AMAT P5000 SUSCEPTOR LIFT ASSY 0010-09340
AMAT P5000 RS232 VIDEO INTERCONNECT BOARD 0100-09145
AMAT P5000 ROBOT DRIVE 8 INCH 0010-13321R
AMAT P5000 PNUEMATIC CONTROL BOARD 0100-09008
AMAT P5000 P-CHUCK LIFT PRECISION 5000 0010-30029
AMAT P5000 LIQUID SOURCE HEATER CONTROL BOARD 0100-0918
AMAT P5000 LAMP MODULE ASSY PLATED 200MM 0010-09978
AMAT P5000 GAS PANEL BOARD 0100-76258
NOVELLUS C2 ALTUS TYLAN GENERAL ADAPTORR AC2 27-053667-
NOVELLUS C2 ALTUS RIGHT LOADLOCK INTFC PCB 03-034720-00
NOVELLUS C2 ALTUS DIGITAL DYNAMICS IO CONT 27-10157-00
NOVELLUS C2 ALTUS DIAGNOSTIC HUB CT-N806 CORMAN TECH.
LAM 4500 WAFER HANDLER 715-130080-008
LAM 4500 GAP MOTOR CONTROLLER BOARD 810-17018
LAM 4500 FORCE COMPUTERS PCB 810-017034-300
LAM 4500 ASSY GAP DRIVE PROTECTOR 853-011168
LAM 4500 16 CHANNEL HEAT/COOL BOARD 810-17082
VARIAN E SERIES PCB ASSY DIGITAL IO E15000031
VARIAN E SERIES ORIENTIER CONTROLLER E11001411
VARIAN E SERIES LINEAR MOTOR SERVO CONTROLLER E11001062
VARIAN E SERIES INTERFACE 101927002
VARIAN E SERIES DRIVE,ELEVATOR,?ASSY E11035771
VARIAN E SERIES ARM SERVO CONTROLLER E11001000
AMAT P5000 CASSETTE HANDLER 0010-76739 & 0010-13104
LAM 4500 HARMONIC ARM DRIVE ASSEMBLY 853-012123-001
LAM 4500 FORCE COMPUTERS PCB 810-017038-002
LAM 4500 FORCE COMPUTERS PCB 810-017035-001
LAM 4500 ASSEMBLY HARD DRIVE W/ CONT. 853-190023-001
LAM 4500 SPINNER ASSY 853-012525-001
LAM 4500 PCB 810-017075-003
LAM 4500 Outer Gate Assy 853-012350-002
LAM 4500 Etcher Inner Gate Valve Drive 853-012200-002
LAM 4500 POWER SUPPLY,+5 +\-15VDC,PS2 660-091821-001
LAM 4500 MONITOR ASSY 852-017500-003
LAM 4500 GAP DRIVE AMP INTERLOCK BOARD 810-17013
LAM 4500 ASSY DIP HIGH FREQUENCY 810-017003-004
LAM 4500 PCB HEARTBEAT 810-17012-002
LAM 4500 ASSY EDGE SENSOR 853-012500-002
LAM 4500 WELDMENT 839-011237-001
AMAT XR80 CONTACTER DRIVE 0100-90385
AMAT XR80 CHASSIS ASSY 0090-91657ITL
AMAT XR80 CHASSIS ASSY 0090-91251ITL
AMAT XR80 CHASSIS ASSY 0090-91621ITL
AMAT XR80 80Kv PRE ACCELERATION CONVERTER 0090-91131
AMAT XR80 HV POWER SUPPLY 0090-91130
AMAT XR80 DATA ACQUISITION INVERTER 0100-90027
AMAT XR80 TPDU MONITOR 0100-90492
AMAT XR80 GAP SERVO 0100-91055
NIKON i14,EX14,S202 Reticle Blinds unit 4B991-003AN
NIKON i14,EX14,S202 Sub Alignment Controller 4S990-546
NIKON i14,EX14,S202 PZT Driver 4S586-274
NIKON i14,EX14,S202 Load/Unload Slider Assembly 4B019-9
NIKON Z Theta Scale Unit For (S202+) Voice Coil 4S081-
NIKON i14,EX14,S202 Accelerometer Controller 4S585-505
NIKON i14,EX14,S202 X Linear Motor Stage A 4S061-688-2
NIKON i14,EX14,S202 Y Fine Stage Amp (S202) / Reticle S
NIKON i14,EX14,S202 Y Linear Motor Stage A 4S061-690-1
NIKON i14,EX14,S202 Wafer Loader robot 4K171-841-5AN
NIKON i14,EX14,S202 REX RL Full Assembly 4B020-355AN
NIKON i14,EX14,S202 WL3 Robot Controller 4S061-495-2A
NIKON i14,EX14,S202 RL Wait Table Unit 4B020-229AN
NIKON i14,EX14,S202 Piezo Drive Amp 4S991-306AN
NIKON Oscillation Mirror Unit 4L990-947
NIKON Z Theta 1, 2 & 3 4B991-099 / 4B991-100 / 4B991-1
NIKON i14,EX14,S202 HP5517C Interferometer Laser Head 4
NIKON i14,EX14,S202 Reticle Microscope Drive 4B990-963
NIKON i14,EX14,S202 Reticle Microscope Drive 4B990-964
VARIAN E1000 PCB SUB ASSY. DOSE CONTROLLER 112321003
VARIAN E1000 PCB ASSY LOAD LOCK INTERFACE D-E15000710
VARIAN E1000 307 VACUUM GUAGE CONTROLLER E23000035
VARIAN E1000 POWER BOX ASSY E11038270 REV 6
VARIAN E1000 EXHAUST CONDUCTIVITY MONITOR E11049810
NIKON FIA AF Sensor Unit (PCB 4S007-663) 4B990-840
NIKON i14,EX14,S202 FIA Lamp Power Supply 4B990-840
NIKON i14,EX14,S202 CX Carrier Unit 4B020-228AN
NIKON i14,EX14,S202 Pneumatic Control Box For Air Mount
NIKON VT284-CRT Terminal 4S598-039
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