| 型號<\/span><\/strong> <\/p> <\/td> | ZHDS-400<\/span><\/strong> <\/p> <\/td> <\/tr> | 真空腔室<\/span><\/strong> <\/p> <\/td> | L400×W400×H500<\/span>，前后開門結構，SUS304<\/span>不銹鋼材質,<\/span><\/span> <\/p> <\/td> <\/tr> | 真空系統(tǒng)<\/span><\/strong> <\/p> <\/td> | 復合分子泵+<\/span>直聯(lián)旋片泵，超高真空插板閥，“<\/span>兩低一高”<\/span>數顯復合真空計<\/span> <\/p> <\/td> <\/tr> | 極限真空<\/span><\/strong> <\/p> <\/td> | 優(yōu)于6.0×10-5<\/sup>Pa(<\/span>如需獲得更高的真空度可選擇進口真空泵組)<\/span><\/span> <\/p> <\/td> <\/tr> | 基片臺<\/span><\/strong> <\/p> <\/td> | ≤120mm<\/span>；基片臺加熱：室溫～300℃<\/span>；基片臺旋轉及光控定位<\/span> <\/p> <\/td> <\/tr> | 蒸發(fā)源<\/span><\/strong> <\/p> <\/td> | 8<\/span>組蒸發(fā)源（舟式源或掛絲源，兼容有機材蒸發(fā)） <\/span><\/span><\/span> <\/p> <\/td> <\/tr> | 膜厚控制<\/span><\/strong> <\/p> <\/td> | 掩膜及膜厚控制系統(tǒng)：定制掩膜機構<\/span> <\/p> 采用晶振膜厚儀在線監(jiān)測、控制膜厚<\/span> <\/p> <\/td> <\/tr> | 手套箱系統(tǒng)<\/span><\/strong> <\/p> <\/td> | 手套箱箱體尺寸：大箱體L1800×W750×H900mm<\/span><\/span> <\/p> 箱體泄露率<0.05vol%/h<\/span>，標準環(huán)境箱體內水、氧指標<1ppm<\/span><\/span> <\/p> <\/td> <\/tr> | 控制方式<\/span><\/strong> <\/p> <\/td> | 鍍膜系統(tǒng)采用手動按鈕控制，手套箱系統(tǒng)采用PLC+<\/span>觸摸屏控制<\/span> <\/p> <\/td> <\/tr> | 報警及保護系統(tǒng)<\/span><\/strong> <\/p> <\/td> | 對泵、電極等缺水，過流過壓，斷路等異常情況進行報警并執(zhí)行相應保護措施；<\/span>完善的邏輯程序互鎖保護系統(tǒng)<\/span> <\/p> <\/td> <\/tr> <\/tbody> <\/table> <\/p> <\/td> | <\/td> <\/tr> <\/tbody> <\/table><\/div>
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