連續(xù)回轉(zhuǎn)PECVD系統(tǒng) BTF-1200C-RP-PECVD |
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價格: 元(人民幣) | 產(chǎn)地:安徽合肥 |
最少起訂量:1臺 | 發(fā)貨地:本地至全國 | |
上架時間:2020-04-07 09:36:22 | 瀏覽量:542 | |
安徽貝意克設(shè)備技術(shù)有限公司
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經(jīng)營模式:生產(chǎn)加工 | 公司類型:私營合伙企業(yè) | |
所屬行業(yè):化工設(shè)備 | 主要客戶:高校 | |
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聯(lián)系人:貝意克 (先生) | 手機(jī):17354094989 |
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郵箱:1085847693@qq.com | 地址:安徽省合肥市高新區(qū)科學(xué)大道110號新材料園 |
主要特點(diǎn) 該款設(shè)備是全自動Plasma增強(qiáng)CVD系統(tǒng)(PECVD),連續(xù)可控溫度以及Plasma強(qiáng)度等,配備真空系統(tǒng),可以低壓條件下實現(xiàn)工藝,PECVD系統(tǒng)能使整個實驗腔體都處于輝光產(chǎn)生區(qū),輝光相對均勻等效,很好的解決了傳統(tǒng)等離子工作不穩(wěn)定狀態(tài),該設(shè)備爐管可360°旋轉(zhuǎn),有助于粉料的燒結(jié)更均勻,可大角度傾斜,方便進(jìn)出料,傾斜角度在0-35°之間,所有物料經(jīng)過的管道都選用非金屬材質(zhì),如:進(jìn)出料腔體選用石英材質(zhì),推料桿選用石英及聚四氟材質(zhì)。 The device is a fully automated Plasma Enhanced CVD System (PECVD) with continuous temperature control and Plasma strength. Equipped with a vacuum system that can be used under low pressure conditions. The PECVD system enables the entire experimental chamber to be in the glow generation area. The light is uniform and equivalent, which solves the unstable operation of the traditional plasma. The tube of the device can rotate 360°, which helps the sintering of the powder to be more uniform, can be inclined at a large angle, and is convenient for feeding and discharging. The inclination angle is Between 0-35°, all pipeline materials passing through are made of non-metallic materials. For example, the inlet and outlet chambers are made of quartz, and the push rods are made of quartz and PTFE.
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