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\r技術參數\r<\/p>\r

\r旋轉工作臺\r<\/p>\r

\r       <\/span>旋轉精度（徑向）（0.02+3.5H/10000<\/span>）μm<\/span>\r<\/p>\r

\r       <\/span>旋轉精度（橫向）（0.02+3.5X/10000<\/span>）μm<\/span>\r<\/p>\r

\r                      H<\/span>為測量高度（mm<\/span>）,X<\/span>為測量半徑（mm<\/span>）  <\/span>\r<\/p>\r

\r       <\/span>旋轉速度:             2,4,6,10rpm<\/span>\r<\/p>\r

\r      <\/span>工作臺有效直徑:     235mm(200mm:DS,DH <\/span>型號)<\/span>\r<\/p>\r

\r       <\/span>調心范圍:             <\/span>±3mm<\/span>（±5mm<\/span>：DS,DH <\/span>型號）\r<\/p>\r

\r     \r <\/span>調水平范圍:         <\/span>±1<\/span>°\r<\/p>\r

\r       <\/span>最大測量直徑:       300mm<\/span>\r<\/p>\r

\r       <\/span>最大工件直徑:       580mm<\/span>\r<\/p>\r

\r       <\/span>臺面最大承重:       30kg<\/span>\r<\/p>\r

\r垂直軸（Z<\/span>軸）\r<\/p>\r

\r       <\/span>垂直移動  :        \r300mm(500mm:AH,DH <\/span>型號)<\/span>\r<\/p>\r

\r       <\/span>直線度（λc2.5<\/span>）:   0.10<\/span>μm/100mm<\/span>，0.15<\/span>μm/300mm<\/span>\r<\/p>\r

\r                                <\/span>（0.25<\/span>μm/500mm<\/span>：AH,DH<\/span>型號）                  <\/span>\r<\/p>\r

\r      <\/span>與轉盤軸平行度:     0.7<\/span>μm/300mm<\/span>\r<\/p>\r

\r                                <\/span>（1.2<\/span>μm/500mm:AH,DH <\/span>型號）\r<\/p>\r

\r       <\/span>定位速度:             <\/span>最大 50mm/s<\/span>\r<\/p>\r

\r        <\/span>測量速度:             0.5,1,2,5mm/s<\/span>\r<\/p>\r

\r        <\/span>最大檢測高度        300mm(OD),300(ID)<\/span>\r<\/p>\r

\r                                   [500mm:AH,DH <\/span>型號]<\/span>\r<\/p>\r

\r        <\/span>最大檢測深度:        85mm- <\/span>Φ32mm<\/span>更多\r<\/p>\r

\r                                    50mm- <\/span>Φ7mm<\/span>更多           <\/span>\r<\/p>\r

\r水平臂（X<\/span>軸）\r<\/p>\r

\r         <\/span>水平移動 :              175mm(<\/span>包括工作臺旋轉中心\r<\/p>\r

\r                                      -25mm<\/span>～+150mm<\/span>的突出量）         <\/span>\r<\/p>\r

\r         <\/span>直線度（λc2.5<\/span>）:     0.7<\/span>μm/150mm<\/span>\r<\/p>\r

\r        <\/span>與轉臺軸的垂直度:    1.0<\/span>μm/150mm<\/span>\r<\/p>\r

\r        <\/span>定位速度:                 <\/span>利用操縱桿，最大30mm/s<\/span>\r<\/p>\r

\r        <\/span>測量速度:                  0.5,1,2,5mm/s<\/span>\r<\/p>\r

\r測針和測頭\r<\/p>\r

\r        <\/span>測量范圍:            <\/span>±400<\/span>μm/<\/span>±40<\/span>μm/<\/span>±4<\/span>μm<\/span>\r<\/p>\r

\r        <\/span>測力:                  10-50mN(5<\/span>級轉換)<\/span>\r<\/p>\r

\r        <\/span>標準測針:            <\/span>硬質合金球，Φ1.6mm<\/span>\r<\/p>\r

\r        <\/span>測量方向雙方向:<\/span>\r<\/p>\r

\r        <\/span>測量角度調整:        <\/span>±45<\/span>°(<\/span>帶刻度）\r<\/p>\r

\r供氣\r<\/p>\r

\r        <\/span>氣壓:      \r0.39MPa<\/span>\r<\/p>\r

\r       <\/span>\r<\/p><\/div>