| PSG500 tungsten | PSG500-S tungsten, setpoints | PSG502-S nickel, setpoints | PSG510-S tungsten, setpoints, ceramic feedthroughs | PSG512-S nickel, setpoints, ceramic feedthroughs |
| 測量原則 | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani |
| 精度 (N2) |
| 1 x 10-3… 100 毫巴 | of reading | ±15 | ±15 | ±15 | ±15 | ±15 |
| 5 x 10-4… 1 x 10-3?毫巴 | of reading | ±50 | ±50 | ±50 | ±50 | ±50 |
| 100 … 1000 毫巴 | of reading | ±50 | ±50 | ±50 | ±50 | ±50 |
| 可重復(fù)性（空氣） |
| 1 x 10-3… 100 毫巴 | of reading | 2 | 2 | 2 | 2 | 2 |
| 輸出信號（測量信號） |
| 電壓范圍 | V | 0 … 10.3 | 0 … 10.3 | 0 … 10.3 | 0 … 10.3 | 0 … 10.3 |
| 測量范圍 | V | 1.9 … 10.0 | 1.9 … 10.0 | 1.9 … 10.0 | 1.9 … 10.0 | 1.9 … 10.0 |
| 測量范圍（空氣、O2、CO、N2） | mbar | 5 x 10-4?to 1000 | 5 x 10-4?to 1000 | 5 x 10-4?to 1000 | 5 x 10-4?to 1000 | 5 x 10-4?to 1000 |
| 設(shè)定點 |
| 設(shè)定點數(shù)量 | 2 | 2 | 2 | 2 |
| 設(shè)置范圍 | mbar | ? | 2 x 10-3?… 500 | 2 x 10-3?… 500 | 2 x 10-3?… 500 | 2 x 10-3?… 500 |
| 滯后 | of reading | ? | 10 above lower threshold | 10 above lower threshold | 10 above lower threshold | 10 above lower threshold |
| 繼電器觸點 | V (dc)? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?A (dc) | ? | 30 | 30 | 30 | 30 |
| 繼電器觸點： 轉(zhuǎn)換時間 | ms | ? | <20 | <20 | <20 | <20 |
| 電源電壓 |
| 真空計上 | V (dc) | 14 … 30 | 14 … 30 | 14 … 30 | 14 … 30 | 14 … 30 |
| 波紋 | V (p-p) | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| 電壓與壓強 | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade |
| 內(nèi)部容積 |
| DN 16 ISO-KF，DN 16 CF-R，7/16-20 UNF | cm3 (in.3) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) |
| DN 16 ISO-KF & DN 16 CF-R 長管 | cm3 (in.3) | 10 (0.61) | 10 (0.61) | 10 (0.61) | 10 (0.61) | 10 (0.61) |
| 1/8＇＇ NPT，4 VCR，8 VCR，1/2＇＇ 管 | cm3 (in.3) | 2 (0.122) | 2 (0.122) | 2 (0.122) | 2 (0.122) | 2 (0.122) |
| 容許溫度 |
| 運行 | °C | 5 … 60 | 5 … 60 | 5 … 60 | 5 … 60 | 5 … 60 |
| 真空連接 (1) | °C | 80 / 250?(2) | 80 / 250?(2) | 80 / 250?(2) | 80 / 250?(2) | 80 / 250?(2) |
| 貯存 | °C | -20 … 65 | -20 … 65 | -20 … 65 | -20 … 65 | -20 … 65 |
| 重量 |
| DN 16 ISO-KF，7/16-20 UNF | g | 80 | 80 | 80 | 80 | 80 |
| DN 16 CF-R，4 VCR | g | 100 | 100 | 100 | 100 | 100 |
| 1/8＇＇ NPT，1/2＇＇ 管 | g | 70 | 70 | 70 | 70 | 70 |
| 8 VCR，DN 16 ISO-KF 長管 | g | 130 | 130 | 130 | 130 | 130 |
| DN 16 CF-R 長管 | g | 140 | 140 | 140 | 140 | 140 |
| 錯誤信號 | V | 0 … 0.5 (filament rupture) | 0 … 0.5 (filament rupture) | 0 … 0.5 (filament rupture) | 0 … 0.5 (filament rupture) | 0 … 0.5 (filament rupture) |
| 輸出電阻 | ? | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 |
| *小負(fù)載電阻 | k? | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof |
| 反應(yīng)時間 | ms | 80 | 80 | 80 | 80 | 80 |
| 真空計識別 | k? | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common |
| 調(diào)整 | one tactile switch for ATM ａnd HV adjustment | one tactile switch for ATM ａnd HV adjustment | one tactile switch for ATM ａnd HV adjustment | one tactile switch for ATM ａnd HV adjustment | one tactile switch for ATM ａnd HV adjustment |
| 電流消耗 | mA | <500 (max. starting current) | <500 (max. starting current) | <500
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