BROOKS進(jìn)口氣體質(zhì)量流量計(jì)SLA5850S 一年質(zhì)保 認(rèn)證報(bào)告提供
Flow Ranges* Models SLA5850/SLA5860 - Any FS range from 0-3 sccm to 0-30 slpm N2 eq. Models SLA5851/SLA5861 - Any FS range from 20-100 slpm N2 eq. Up to 200 slpm H2 flows possible Models SLA5853/SLA5863 - Any FS range from 100-2500 slpm N2 eq. *Standard: 0° and 101kPa (760 Torr). Control Range 2-100% Accuracy For flow rates up to 1200 slpm N2 equivalent; ±1.0% of rate, including linearity (20% to 100% FS), else ±0.2% of FS (below 20% full scale). For flow rates greater than 1200 slpm and up to 2500 slpm N2 equivalent; ±1.0% of FS. Repeatability ±0.20% of rate Settling Time/Response Time For flow rates up to 100 slpm N2 equivalent; less than 1 second to within ±2% full scale of final value for a 0-100% command step. For flow Rates greater than 100 slpm N2 up to 2500 slpm N2 equivalent; less than 3 seconds to within ±2% full scale of final value for a 0-100% command step. Sensitivity to Mounting Attitude ± 0.5% FS maximum deviation from specified accuracy, after rezeroing
BROOKS 進(jìn)口氣體質(zhì)量流量計(jì)SLA5850S 一年質(zhì)保 認(rèn)證報(bào)告提供 如有需要請(qǐng)聯(lián)系客思特設(shè)備孫曉娜
